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01.
arXiv (CS.AI) 2026-06-17

Learning to Decide with AI Assistance under Human-Alignment

arXiv:2605.12646v2 Announce Type: replace-cross Abstract: It is widely agreed that when AI models assist decision-makers in high-stakes domains by predicting an outcome of interest, they should communicate the confidence of their predictions. However, empirical evidence suggests that decision-makers often struggle to determine when to trust a prediction based solely on this communicated confidence. In this context, recent theoretical and empirical work suggests a positive correlation between the utility of AI-assisted decision-making and the degree of alignment between the AI confidence and the decision-makers' confidence in their own predictions. Crucially, these findings do not yet elucidate the extent to which this alignment influences the complexity of learning to make optimal decisions through repeated interactions. In this paper, we address this question in the canonical case of binary predictions and binary decisions. We first show that this problem is equivalent to a two-armed online contextual learning problem with full feedback, and establish a lower bound of $\Omega (\sqrt{|H| \cdot |B| \cdot T} )$ on the expected regret any learner can attain, where $H$ and $B$ denote the sets of human and AI confidence values. We then demonstrate that, under perfect alignment between AI and human confidence, a learner can attain an expected regret of $O(\sqrt{|H| \cdot T\log T})$ and, when $\sqrt{|H|} = O(\log T)$ and $B$ is countable, a non-trivial generalization of the Dvoretzky-Kiefer-Wolfowitz inequality improves the regret bound to $O(\sqrt{T\log T})$. Taken together, these results reveal that alignment can reduce the complexity of learning to make decisions with AI assistance. Experiments on real data from two different human-subject studies where participants solve simple decision-making tasks assisted by AI models show that our theoretical results are robust to violations of perfect alignment.

03.
arXiv (CS.AI) 2026-06-12

Multiagent Protocols with Aggregated Confidence Signals

arXiv:2606.13591v1 Announce Type: new Abstract: Confidence is used for reliability, oversight, and a range of downstream decision tasks in Natural Language Processing (NLP), yet no existing method produces or evaluates a confidence for the output of a multiagent system. Prior work uses confidence within multiagent debate (MAD) to weight messages, trigger debate, or calibrate individual agents, but it never aggregates these into a single confidence for the system itself. We introduce three protocols that produce a final answer along with a single aggregated confidence by first transforming raw confidence signals to make them comparable across models, then combining them via soft voting or a probability fusion we call Bayesian fusion. This aggregated confidence is substantially more discriminative (AUARC) than that of the best single agent or the standard debate baselines, while correctness (F1-score) stays stable and recovers the losses MAD incurs on more ambiguous tasks. Analyzing two estimators, sequence probability and self-report, alongside parametric and non-parametric calibrators, we find that calibration improves F1 for both estimators while AUARC is less reliant on it. We evaluate six homogeneous and heterogeneous debating pairs per benchmark, across five benchmarks and four task types, spanning a range of model capabilities and sizes.

04.
arXiv (CS.LG) 2026-06-11

Flow Matching with In-Context Priors for Out-of-Distribution Brain Dynamics

arXiv:2606.11833v1 Announce Type: new Abstract: Flow matching and diffusion models enable conditional generation across domains ranging from images to proteins, with recent extensions to out-of-distribution contexts. Yet generative models of neural time series have largely remained restricted to categorical conditioning, precluding compositional and zero-shot generalization. In this work, we propose a per-timestep conditioned diffusion transformer for generating realistic fMRI brain dynamics during unseen cognitive tasks by injecting both compositional language and optional spatial priors in-context. Such zero-shot generation could enable counterfactual neuroscience by supporting in-silico design and evaluation of novel cognitive experiments before empirical validation. Leveraging this model, we evaluate across hundreds of held-out task conditions and characterize predictive performance in relation to the training manifold. From language alone, the model recovers region-specific recruitment across tasks and held-out spatial activation patterns. Spatial priors, when available, complement the text pathway by anchoring generation in regions of task space where language alone degrades, while retaining the compositional structure needed for counterfactual task specification. To our knowledge this is the first generative model of whole-cortex fMRI dynamics for unseen cognitive tasks, advancing counterfactual neuroscience and data-driven experimental design.

05.
arXiv (CS.CL) 2026-06-17

MedicalAgentsBench for Complex Medical Reasoning: Comparing Internalized Reasoning Models versus Externalized Agent-based Frameworks

Complex medical reasoning requires integrating heterogeneous clinical evidence across multiple inference steps. Large language models (LLMs) now approach this through two routes: internalized reasoning and externalized agent scaffolding (frameworks that decompose problems collaboratively amongst multiple LLMs). To determine whether these routes are exclusive or complementary, we introduce MedicalAgentsBench, a filtered benchmark of 862 complex clinical questions drawn from the union of eight medical datasets via difficulty-aware curation and contamination screening. Evaluating three internalized reasoning models (DeepSeek-R1, o1-mini, and o3-mini), seven base models, and nine externalized agent-based methods, we find that internalized and externalized approaches each independently improve performance, and that their benefits compound: the highest accuracy is achieved by layering agent workflows onto an internalized reasoning model (i.e., o3-mini + MDAgents with 35.1%). Pareto analysis shows this combination dominates the cost-performance frontier; moreover, lightweight optimization on inexpensive models offers an entry point for resource-constrained settings. Our benchmark is at https://github.com/gersteinlab/MedicalAgentsBench.

06.
arXiv (math.PR) 2026-06-25

On the L{é}vy concentration function of Gaussian quadratic forms with applications to second order U-statistics

arXiv:2606.25441v1 Announce Type: new Abstract: We provide an upper-bound for the L{é}vy concentration function: $$ Q_{S}(\varepsilon):= \sup_{x \in\mathbb{R}}\mathbb{P} (x < S \leq x+\varepsilon) $$ where $S$ is a weighted sum of noncentral chi-square random variables: $$ S:= \sum_{k=1}^\infty \lambda_k (Z_k^2 - 1) + \mu_kZ_k $$ Here, $\{Z_k\}_{k=1}^\infty$ is a sequence of independent standard Gaussian random variables and $\{\lambda_k\}_{k=1}^\infty, \{\mu_k\}_{k=1}^\infty$ are real valued, square summable sequences. Random variables of this type often appear as limiting distributions of second order U-statistics. Our bound is adaptive, in that it recovers (up to constant factors) Gaussian type concentration function estimates if $\|\lambda\|_2$ is negligible compared to $\|\mu\|_2$ and chi-square estimates if $\|\mu\|_{2}$ is negligible compared to $\|\lambda\|_2$. Our bound generalizes existing bounds in various ways. In particular, we make no assumptions regarding the number of nonzero $|\lambda_k|$ or the size of the minimal $|\lambda_k|$, nor do we make any assumptions on the signs of $\lambda_k$. Finally, we apply our bound to some examples of interest, specifically quadratic forms that arise in limit theorems for second-order U-statistics.

07.
arXiv (CS.CL) 2026-06-17

A Multifaceted Analysis of Social Biases in Large Language Models

Large language models (LLMs) have rapidly become indispensable tools for acquiring information and supporting human decision-making. However, ensuring that these models uphold fairness across varied contexts is critical to their safe and responsible deployment. In this study, we undertake a comprehensive examination of four widely adopted LLMs, probing their underlying biases and inclinations across the dimensions of politics, ideology, alliance, language, and gender. Through a series of carefully designed experiments, we investigate their political neutrality using news summarization, ideological biases through news stance classification, tendencies toward specific geopolitical alliances via United Nations voting patterns, language bias in the context of multilingual story completion, and gender-related affinities as revealed by responses to the World Values Survey. Results indicate that while the LLMs are aligned to be neutral and impartial, they still show biases and affinities of different types.

08.
arXiv (CS.LG) 2026-06-16

Ricci-Filtration: Boosting Retrieval-Augmented Generation Reranker to Query-Answer Tasks by Discrete Ricci Flow

arXiv:2606.15482v1 Announce Type: cross Abstract: Ricci flow is a curvature-guided diffusion process that deforms space by shrinking regions of high positive curvature and expanding those with negative curvature. Similarly, discrete Ricci flow on weighted graphs modifies edge weights by shrinking edges with positive Ricci curvature and stretching those with negative Ricci curvature, effectively increasing the separation between clusters. Inspired by these two cornerstone works, we propose a geometry-based RAG reranker enhancement procedure called Ricci-Filtration. By modeling the input query and initial retrieved chunks as a network, where the input query and chunks serve as nodes and embedding-based pairwise relations define an initial graph, Ricci-Filtration leverages discrete curvature and Ricci flow to evaluate the structural importance of each chunk with respect to the user query. The system first filters the initial chunks based on their geometric curvature relative to the query; then, a reranker processes the remaining chunks to enhance generative performance. We theoretically prove that normalized discrete Ricci flow can detect community structures by identifying distinct asymptotic behaviors in edge weights. This supports the removal of ``noisy'' document chunks characterized by large weights and negative Ricci curvature relative to the query node. Extensive experiments confirm that Ricci-Filtration outperforms several baseline reranking methods in accuracy, precision, recall, and F1 scores. Furthermore, ablation studies demonstrate that the Ricci-Filtration generally outperforms the baseline under various settings, highlighting the framework's robustness across different architectures.

09.
arXiv (CS.CL) 2026-06-16

KVEraser: Learning to Steer KV Cache for Efficient Localized Context Erasing

Post-hoc context erasing over the KV cache is challenging because a local edit has a global consequence: once a span has been processed, its influence propagates into the cached states of all subsequent tokens. This issue arises naturally in long-context LLM applications, where stale retrieved facts, incorrect tool observations, retracted user preferences, or harmful prompt injections may be identified only after prefill. Exact erasing must then recompute all tokens after the deleted span, making its computational cost depend on suffix length rather than erased-span length. We introduce KVEraser, a learned KV-cache editing method for efficient localized context erasing. Given a processed context and a span to remove, KVEraser replaces only the KV states of the erased interval with learned steering states while reusing the remaining cache unchanged. To learn a transferable erasing mechanism, we build a two-stage training pipeline: generic span-neighbor pre-training teaches the eraser to suppress the influence of the erased span, while task-specific fine-tuning adapts this capability to downstream scenarios. Experiments show that KVEraser nearly matches full recomputation in post-erasure performance on in-domain tasks across 1K–32K context lengths, while its latency increases by only 24% compared with a 17.6x increase for full recomputation. KVEraser also generalizes to unseen long-document QA tasks with harmful factual distractors, achieving the best performance among approximate baselines with a 3–4x speedup over full recomputation.

10.
arXiv (CS.AI) 2026-06-15

CADET: Physics-Grounded Causal Auditing and Training-Free Deconfounding of End-to-End Driving Planners

Authors:

arXiv:2606.14438v1 Announce Type: cross Abstract: End-to-end (E2E) autonomous-driving planners trained by imitation are prone to statistical shortcuts: they associate scene elements that merely co-occur with expert actions (a roadside object, a building facade) with driving decisions, rather than the variables that causally determine them. Such causal confusion silently compromises reliability in long-tail scenarios, and it is difficult to detect, because prevailing open-loop metrics (L2 displacement and collision rate) are dominated by ego status and do not indicate whether a planner depends on spurious cues. Existing remedies based on causal-intervention training require retraining large models and cannot audit a planner that is already deployed. We present CADET, a training-free framework that audits, benchmarks, and repairs spurious reliance in pretrained E2E planners without any parameter update.

12.
arXiv (CS.CL) 2026-06-16

Less is More: Improving LLM Reasoning with Minimal Test-Time Intervention

Recent progress in large language models (LLMs) has focused on test-time scaling to improve reasoning via increased inference computation, but often at the cost of efficiency. We revisit test-time behavior and uncover a simple yet underexplored phenomenon: reasoning uncertainty is highly localized-only a small subset of high-entropy tokens dominantly affects output correctness. Motivated by this, we propose Minimal Test-Time Intervention (MTI), a training-free framework that enhances reasoning accuracy and stability with minimal overhead. MTI includes: (i) Selective CFG intervention, applying classifier-free guidance only at uncertain positions; and (ii) Lightweight negative-prompt guidance, reusing the main model's KV cache to approximate unconditional decoding efficiently. MTI yields consistent gains across general, coding, and STEM tasks-e.g., +9.28% average improvement on six benchmarks for DeepSeek-R1-7B and +11.25% on AIME2024 using Ling-mini-2.0-while remaining highly efficient.

14.
arXiv (CS.AI) 2026-06-25

Bias Fitting to Mitigate Length Bias of Reward Model in RLHF

arXiv:2505.12843v2 Announce Type: replace-cross Abstract: Reinforcement Learning from Human Feedback (RLHF) relies on reward models to align large language models with human preferences. However, RLHF often suffers from reward hacking, wherein policy learning exploits flaws in the trained reward model to maximize reward scores without genuinely aligning with human preferences. A significant example of such reward hacking is length bias, where reward models usually favor longer responses irrespective of actual response quality. Previous works on tackling length bias have notable limitations, these approaches either mitigate bias without characterizing the bias form, or simply assume a linear length-reward relation. To accurately model the intricate nature of length bias and facilitate more effective bias mitigation, we propose FiMi-RM (Bias Fitting to Mitigate Length Bias of Reward Model), a framework that autonomously learns and corrects underlying bias patterns. Our approach consists of three stages: First, we warm up by training a standard reward model which inherently contains length bias. Next, we deploy a lightweight fitting model to capture the non-linear relation between length and reward. Finally, we incorporate this learned relation into the reward model, effectively decoupling length from reward while preserving preference modeling capabilities. Experimental results demonstrate that FiMi-RM achieves a more balanced length-reward distribution. Furthermore, when applied to alignment algorithms such as Direct Preference Optimization (DPO) and Best-of-N (BoN), our debiased reward model improves length-controlled win rate and reduces verbosity without compromising its performance.

15.
arXiv (CS.AI) 2026-06-18

Bayesian Anytime Pareto Set Identification for Multi-Objective Multi-Armed Bandits

arXiv:2606.18785v1 Announce Type: cross Abstract: Identifying Pareto optimal solutions is critical to support multi-objective decision-making. We introduce the first anytime Multi-Objective Multi-Armed Bandit algorithm for the Pareto Set Identification problem, taking a Bayesian approach: Top-Two Pareto Front Thompson Sampling (TTPFTS). We benchmark TTPFTS against state-of-the-art fixed-budget Pareto Set Identification algorithms on synthetic environments. Next, we demonstrate its practical utility in a challenging multi-objective molecular discovery setting by efficiently exploring an ultra-large synthesis-on-demand molecular library. Furthermore, we introduce a novel uncertainty quantification metric that estimates our algorithm's confidence in the predicted Pareto set. We demonstrate that this metric effectively proxies true performance, yielding a robust methodology for monitoring learning progress in complex settings. Finally, we complement these empirical findings with a theoretical proof of the algorithm's asymptotic correctness.

16.
arXiv (quant-ph) 2026-06-16

Detecting basis-dependent hardware errors through spatio-temporal quantum steering

arXiv:2606.16451v1 Announce Type: new Abstract: Spatio-temporal quantum steering provides a framework for benchmarking the nonclassicality of general quantum state transfer processes. A central diagnostic is the no-signaling-in-time (NSIT) condition, whose violation can indicate basis-dependent hardware errors. However, finite measurement statistics may also yield apparent violations, thereby obscuring the detection of basis-dependent hardware errors. To address this, we construct a statistical hypothesis test under the null hypothesis that NSIT violations arise solely from statistical fluctuations. Combining the statistical properties of NSIT violation under the null hypothesis with Chebyshev's inequality, we obtain a distribution-free upper bound on the $p$-value without parametric assumptions. We apply this method to two examples. For a single-qubit state-transfer experiment on a superconducting processor, we observe several instances that the NSIT violation is observed and the null hypothesis is simultaneously rejected by a small $p$-value, providing statistical evidence of basis-dependent hardware errors. For a seven-qubit Hayden-Preskill teleportation protocol on IonQ devices, the null hypothesis is also rejected even when the average fidelity exceeds the classical threshold, while the associated nonclassicality measure vanishes. Our results highlight the necessity of statistical hypothesis testing for detecting basis-dependent errors in near-term quantum devices.

17.
arXiv (CS.CL) 2026-06-19

How Linear Is a Transformer Feed-Forward Block? Per-Block Linear Recoverability Is Learned, Not Architectural

Authors:

Transformer feed-forward networks (FFNs) are often treated as nonlinear stores of computation, yet how nonlinear a trained FFN block actually is has rarely been measured. We treat each FFN as a position-wise input-to-output map and split it into the exact least-squares linear approximation plus a residual. The held-out variance the closed-form linear map explains defines a block's linear recoverability (R^2_lin), an optimiser-free measure of its linearity. Across all twelve blocks of GPT-2, Pythia-160m, and llama-160m, R^2_lin is highly heterogeneous and non-monotone with depth, ranging from near-linear (>0.99) to strongly nonlinear (

18.
arXiv (math.PR) 2026-06-25

Convergence Rates for Semistochastic Processes

arXiv:2606.25135v1 Announce Type: new Abstract: We study processes that consist of deterministic evolution punctuated at random times by disturbances with random severity; we call such processes semistochastic. Under appropriate assumptions such a process admits a unique stationary distribution. We develop a technique for establishing bounds on the rate at which the distribution of the random process approaches the stationary distribution. An important example of such a process is the dynamics of the carbon content of a forest whose deterministic growth is interrupted by natural disasters (fires, droughts, insect outbreaks, etc.).

19.
arXiv (CS.CL) 2026-06-19

Trustworthy Multi-Agent Systems: Mitigating Semantic Drift with the Argent Signaling Protocol

When multi-agent LLM systems produce bad answers, not all failures are equal: some answers are grounded in the right material but incomplete, while others are simply ungrounded and should be stopped. Current retry strategies treat both cases identically (try again and hope for the best), leaving human supervisors unable to tell whether a retry was warranted or whether the system should have halted instead. We introduce the Argent Signaling Protocol (ASP), a compact machine-readable header that accompanies every AI-generated response with structured quality signals: certainty (@C), grounding (@G), stochasticity (@S), and an assumption index that classifies the evidentiary basis of each claim. These signals enable a controller to distinguish repairable failures from containment failures and route each case differently. We evaluate ASP in two modes. In standalone mode, a 27-question document-grounded QA benchmark over the Array BioPharma/Ono license agreement compares baseline prompts against ASP-instrumented controller actions across three local GGUF models. On Qwen~(0.8B), ASP improves pass rate from 11.1% to 33.3% and mean term coverage from 36.7% to 65.4%; on Dobby~(8B), ASP produces 4 fail-to-pass recoveries, raising pass rate from 33.3% to 44.4%; on SmolLM3~(3B), ASP alternates between repair and containment per question. Aggregate improvement is meaningful (12/81 to 21/81 passes). In multi-agent mode, an ASP sidecar sits between a retrieval agent and a downstream decision agent; the sidecar blocks 100% of ungrounded upstream outputs from reaching the downstream agent (24/27 blocked, 0 ungrounded propagations).

20.
bioRxiv (Bioinfo) 2026-06-12

Computational Design of Optimal Sequences for Targeted Hypermutagenesis Using Recombination-Coupled Diversity-Generating Retroelements

Diversity-generating retroelements (DGRs) are natural systems that accelerate evolution via targeted hypermutation at adenines. We previously developed DGRec, a system combining DGRs and recombineering for programmable mutagenesis in Escherichia coli. We here address two important issues with DGRec: the dependence of mutagenesis efficiency on the dgrRNA secondary structure and the variability of the reverse-transcription biases with sequence context and position. First, we introduce and validate a method to recode non-functional templates, i.e. with low mutagenesis efficiency, into highly functional ones through synonymous mutations. Second, we develop a Long Short-Term Memory (LSTM) model to predict DGRec mutational profiles for any given template sequence. By integrating this LSTM model with our recoding method, we establish a comprehensive workflow for customized directed evolution, enabling researchers to precisely fine-tune DGRec in vivo mutagenesis to their engineering needs.

21.
bioRxiv (Bioinfo) 2026-06-10

Promera: a unified model for biomolecular structure prediction, filtering, and design

Generative models have become staple tools for modeling and designing biomolecular structures. However, although these tools have improved in structural prediction accuracy, their ability to filter designed binders—an essential use case—remains insufficient; whereas design methods have focused more on unconstrained binder generation rather than capabilities enabled by controllable design. We introduce Promera, a unified generative model that combines all-atom structure prediction with improved filtering and controllable design. We find that Promera's confidence metrics are more accurate for filtering binders from non-binders for both miniproteins and nanobodies, while its co-folding performance surpasses popular open-source models (OpenFold3-p2, Boltz-2) on therapeutically relevant categories. As a design model, Promera generates binders by predicting masked protein sequences with optional epitope, paratope, and template constraints. Remarkably, our nanobody designs match the in silico success rates from backprop-based techniques (mBER) when evaluated under co-folding confidence filters. We further provide two in silico demonstrations of the the versatile capabilities of our design method: epitope targeting of the Andes hantavirus glycoprotein with VHHs and active state stabilization of the beta-2 andrenergic GPCR. We conclude by proposing a scaling law for co-folding models, suggesting a path for further performance improvement.

22.
arXiv (math.PR) 2026-06-11

Large deviations for marked sparse random graphs with applications to interacting diffusions

arXiv:2204.08789v2 Announce Type: replace Abstract: We consider the empirical neighborhood distribution of marked sparse Erdős-Rényi random graphs, obtained by decorating edges and vertices of a sparse Erdős-Rényi random graph with i.i.d. random elements taking values on Polish spaces. We prove that the empirical neighborhood distribution of this model satisfies a large deviation principle in the framework of local weak convergence. We rely on the concept of BC-entropy introduced by Delgosha and Anantharam~(2019) which is inspired on the previous work by Bordenave and Caputo~(2015). Our main technical contribution is an approximation result that allows one to pass from graph with marks in discrete spaces to marks in general Polish spaces. As an application of the results developed here, we prove a large deviation principle for interacting diffusions driven by gradient evolution and defined on top of sparse Erdős-Rényi random graphs. In particular, our results apply for the stochastic Kuramoto model. We obtain analogous results for the sparse uniform random graph with given number of edges.

23.
arXiv (CS.CV) 2026-06-16

Uncertainty Quality of VGGT: An Analysis on the DTU Benchmark Dataset

Visual Geometry Grounded Transformer (VGGT) has already attracted a great deal of attention in a short period of time, not least due to the Best Paper Award at CVPR-2025. Similar to DUSt3R and MASt3R, VGGT aims to bring about a paradigm shift by replacing established methods like bundle adjustment and feature matching with a simple, unified, feed-forward neural network that predicts camera poses, depth maps, and dense 3D structure directly from multiple images of a scene in a few seconds. A key aspect is its ability to process an arbitrary number of views consistently in a single forward pass without any post-processing or iterative optimization. For photogrammetry, this opens new possibilities for real-time, scalable, and accessible 3D reconstruction. In this context, not only high reconstruction accuracy but also high-quality uncertainty estimates are crucial, as they foster trust and enable robust quality assurance. This paper therefore investigates the quality of VGGT's uncertainty predictions. The analysis identifies an effective confidence threshold for filtering VGGT's raw output and demonstrates that enhancing uncertainty quality holds strong potential for improving the accuracy of its 3D reconstructions.

24.
arXiv (CS.AI) 2026-06-25

FBOS-RL: Feedback-Driven Bi-Objective Synergistic Reinforcement Learning

arXiv:2605.20256v2 Announce Type: replace-cross Abstract: Reinforcement learning has become a cornerstone for aligning and unlocking the reasoning capabilities of large-scale models. At its core, the training loop of GRPO and its variants alternates between rollout sampling and policy update: the policy first samples rollouts from its action space, and then updates its parameters according to the advantages computed over them. Unlike supervised learning, where each gradient step is anchored to an explicit ground-truth target, the optimal gradient direction for updating model parameters in this setting is not known a priori; the high-quality rollouts drawn during the sampling stage therefore act as the implicit "teacher" that guides every parameter update. However, mainstream RL algorithms such as GRPO adopt a simple sampling scheme that conditions all rollouts on the same original prompt. When a task lies beyond the policy model's current capability, this sampling scheme rarely yields a high-quality rollout, leaving the policy model without a meaningful gradient direction when updating its parameters, which causes training to stall. To address this issue, we propose FBOS-RL. Specifically, we let the model perform Feedback-Guided Exploration Enhancement based on the feedback provided by the environment, and on top of this we design two mutually reinforcing training objectives: EPA and ECC. Extensive experiments demonstrate that EPA and ECC can mutually reinforce each other, forming a positive flywheel effect that significantly improves both the training efficiency and the final performance ceiling of reinforcement learning. Specifically, under both an identical number of rollouts and the same number of training steps, FBOS-RL learns substantially faster than GRPO and feedback-based baselines and ultimately attains a higher performance ceiling, while exhibiting higher policy entropy and lower gradient norms throughout training.

25.
arXiv (CS.AI) 2026-06-11

Physics-informed generative AI for semiconductor manufacturing: Enforcing hard physical constraints in generative models by construction

arXiv:2606.11247v1 Announce Type: cross Abstract: Generative models are increasingly used to propose designs, data, and control actions for physical systems, yet many such systems are governed by hard physical constraints rather than by perceptual plausibility. Semiconductor manufacturing provides a demanding test case: generated masks, layouts, synthetic defect data, and process recipes must obey lithography, transport, reaction, and device-physics constraints, because physically invalid samples are not merely low quality but unusable. This Perspective argues that semiconductor manufacturing exposes a broader computational-science challenge, namely that generative AI for constrained physical domains must be physics-informed by construction, not corrected only through post-hoc filtering. We survey the emerging architectural toolkit, including physics-informed diffusion, PDE-constrained variational models, neural-operator priors, and conservation-law-respecting generative networks, and show how it connects to differentiable lithography, TCAD, process simulation, and autonomous experimentation. We identify four integration patterns between generative models and physics-based simulators, and we propose a research agenda centered on physics-fidelity benchmarks, differentiable simulator infrastructure, and multimodal foundation models for physical design and manufacturing. The central claim is analytical rather than rhetorical: where physical validity is the binding criterion of success, architectures that enforce it by construction should be expected to outperform those that filter for it after the fact, and the fab is the setting where this distinction is sharpest.